SEMICON West 2024

IPG Exhibits Sustainable, Cost-Effective Silicon Wafer Heater by Laser 

IPG Photonics (Booth 5338) announces the creation of a highly efficient, reliable and sustainable laser technology, based on its market-leading DLS-ECO heater platform which is able to slash both the energy consumption and maintenance costs of heating a silicon wafer. The 970nm DLS-ECO radiation is efficiently and directly absorbed by the silicon wafer, so little energy is lost to the surrounding chamber.

Simulations and experimental data show that <20kW of optical energy is required to heat a 300mm silicon wafer to 800°C in under 10sec, while <15kW of power is needed to maintain that high temperature. The optical energy is delivered by optical fiber, enabling the laser chassis to operate outside of the cleanroom environment where utilities such as cooling wafer are easily provided. The DLS-ECO operates at 55% electrical-to-optical conversion efficiency, minimizing total energy consumption by the process, while maintenance-free operation is anticipated for at least a seven year, uninterrupted period of operation.

As a technical mature heating solution able to address both the energy and maintenance costs of heating silicon wafers,  the DLS-ECO wafer heater offers a timely solution for the sustainable wafer fab of the future.